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Browsing by  AuthorMaeng, WJ

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하
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Showing results 16 to 19 of 19
Article
Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic ApplicationSCIESCOPUS

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 156, no. 5, page. D188 - D192, 2009-01

Article
The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridationSCIESCOPUS

JOURNAL OF APPLIED PHYSICS, vol. 104, no. 6, 2008-09-15

Article
Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrodeSCIESCOPUS

MICROELECTRONIC ENGINEERING, vol. 85, no. 1, page. 39 - 44, 2008-01

Article
Thermal and plasma-enhanced ALD of Ta and Ti oxide thin films from alkylamide precursorsSCIESCOPUS

ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 9, no. 6, page. G191 - G194, 2006-01

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