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Conference
Plasma enhanced atomic layer deposition of TaCxNy thin film with TBTDET and methane/hydrogen gas for NMOSFET gate electrode

10th International Conference on Atomic Layer Deposition, Seoul Education Culture Center, 2010-06-22

Conference
Plasma enhanced atomic layer deposition of TaCxNy thin film with TBTDET and methane/hydrogen gas for NMOSFET gate electrode

10th International Conference on Atomic Layer Deposition, 2010-06-22

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