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Browsing by  AuthorChoi, KK

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Article
Metalorganic chemical vapor deposition of copper using (hexafluoroacetylacetonate)Cu((I))(3,3-dimethyl-1-butene) with a liquid delivery systemSCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 41, no. 5A, page. 2962 - 2968, 2002-05

Article
Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devicesSCIESCOPUS

RSC ADVANCES, vol. 5, no. 106, page. 87084 - 87089, 2015-01

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