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Critical dimension variations of sub 5-nm node fin and nanosheet FETs

Title
Critical dimension variations of sub 5-nm node fin and nanosheet FETs
Authors
Yoon, Jun-SikLee, SeunghwanJeong, JinsuBAEK, ROCK HYUN
Date Issued
3-Jul-2019
Publisher
NANO KOREA
URI
http://oasis.postech.ac.kr/handle/2014.oak/99379
Article Type
Conference
Citation
the 17th International Nanotech Symposium & Exhibition, 2019-07-03
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 BAEK, ROCK HYUN
Dept of Electrical Enginrg
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