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Cited 2 time in webofscience Cited 4 time in scopus
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Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography

Title
Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
Authors
Kim, BHPark, SMPark, SWPark, YBKim, HJPark, CG
POSTECH Authors
Park, CG
Date Issued
Nov-2012
Publisher
AMERICAN INSTITUTE OF PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/9745
DOI
10.1063/1.4766440
ISSN
0003-6951
Article Type
Article
Citation
Applied Physics Letters, vol. 101, no. 21, page. 212113-1-5, 2012-11
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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