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Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
- Title
- Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
- POSTECH Authors
- Park, CG
- Date Issued
- Nov-2012
- Publisher
- AMERICAN INSTITUTE OF PHYSICS
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- Applied Physics Letters, vol. 101, no. 21, page. 212113-1-5, 2012-11
- Files in This Item:
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg