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Parylene-H 박막을 절연막으로 이용한 실리콘 바이오센서의 DC 특성 및 신뢰성 분석

Title
Parylene-H 박막을 절연막으로 이용한 실리콘 바이오센서의 DC 특성 및 신뢰성 분석
Authors
LEE, JEONG SOOCHOI, WONYEONGJIN, BOPARK, CHANOHDONGHOON, KIMSHIN, SEONG HWAN
Date Issued
21-Dec-2018
Publisher
반도체공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/97161
Article Type
Conference
Citation
제1회 반도체공학회 학술대회, 2018-12-21
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 LEE, JEONG SOO
Dept of Electrical Enginrg
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