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The Effect of Carbon Pre-Silicidation Implant (C-PSI) on the Thermal Stability and the Contact Resistivity of Titanium Silicide (TiSi)

Title
The Effect of Carbon Pre-Silicidation Implant (C-PSI) on the Thermal Stability and the Contact Resistivity of Titanium Silicide (TiSi)
Authors
LEE, JEONG SOOIKSOO, PARKBAEK, SANGWON
Date Issued
14-Feb-2019
Publisher
KCS
URI
http://oasis.postech.ac.kr/handle/2014.oak/97147
Article Type
Conference
Citation
제26회 한국반도체학술대회, 2019-02-14
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 LEE, JEONG SOO
Dept of Electrical Enginrg
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