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Cited 17 time in webofscience Cited 17 time in scopus
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Effect of dual frequency on the plasma characteristics in an internal linear inductively coupled plasma source

Title
Effect of dual frequency on the plasma characteristics in an internal linear inductively coupled plasma source
Authors
Kim, KNLim, JHYeom, GYLee, SHLee, JK
Date Issued
Jan-2006
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/9514
DOI
10.1063/1.2405417
ISSN
0003-6951
Article Type
Article
Citation
APPLIED PHYSICS LETTERS, vol. 89, no. 25, 2006-01
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