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Design, Analysis, and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism

Title
Design, Analysis, and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism
Authors
SEYEONG, SEOKSanghee MoonLIM, GEUNBAE
POSTECH Authors
LIM, GEUNBAE
Date Issued
Dec-2018
Publisher
MYU, SCIENTIFIC PUBLISHING DIVISION
Abstract
In this work, a novel micromachined monolithic triaxis gyroscope with advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of ‘tree-shaped’ coupling springs. The simulated driving and x-, y-, z-axis sensing resonance frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and scale factor of 7 mV/deg/s.
In this work, a novel micromachined monolithic triaxis gyroscope with an advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of 'tree-shaped' coupling springs. The simulated driving and x-, y-, and z-axis sensing resonant frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and a scale factor of 7 mV/deg/s.
Keywords
MEMS; Natural frequencies; Q factor measurement; Coupling mechanism; Micro-machined gyroscope; Out-of-plane vibrations; Prototype development; Simulation; Squeeze-film damping; Structural characteristics; Vibratory gyroscope; Gyroscopes
URI
http://oasis.postech.ac.kr/handle/2014.oak/94581
DOI
10.18494/SAM.2018.2022
ISSN
0914-4935
Article Type
Article
Citation
SENSORS AND MATERIALS, vol. 30, no. 12, page. 2823 - 2831, 2018-12
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