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Cited 47 time in webofscience Cited 54 time in scopus
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Observation of inductively coupled-plasma-induced damage on n-type GaN using deep-level transient spectroscopy

Title
Observation of inductively coupled-plasma-induced damage on n-type GaN using deep-level transient spectroscopy
Authors
Choi, KJJang, HWLee, JL
POSTECH Authors
Lee, JL
Date Issued
Jan-2003
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/9455
DOI
10.1063/1.1557316
ISSN
0003-6951
Article Type
Article
Citation
APPLIED PHYSICS LETTERS, vol. 82, no. 8, page. 1233 - 1235, 2003-01
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 LEE, JONG LAM
Dept of Materials Science & Enginrg
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