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0.4nm 해상도의 엔코더 타입 전기용량형 변위센서

Title
0.4nm 해상도의 엔코더 타입 전기용량형 변위센서
Authors
문원규
POSTECH Authors
문원규
Publisher
대한기계학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/83950
Article Type
Conference
Citation
대한기계학회, page. 1450 - 1454
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 MOON, WON KYU
Dept of Mechanical Enginrg
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