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유한요소해석법을 이용한 실리콘 단결정 성장용 전자장 발생장치에 대한 고찰

Title
유한요소해석법을 이용한 실리콘 단결정 성장용 전자장 발생장치에 대한 고찰
Authors
조정식
Date Issued
2006
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001907784
http://141.223.5.61//handle/2014.oak/8001
Article Type
Thesis
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