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Metal-alkylamide와 metal-alkoxide 화합물을 사용한 Hf-silicate 박막의 원자층화학증착 및 유기금속화학증착

Title
Metal-alkylamide와 metal-alkoxide 화합물을 사용한 Hf-silicate 박막의 원자층화학증착 및 유기금속화학증착
Authors
김재현
Date Issued
2006
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001907577
http://141.223.5.61//handle/2014.oak/7795
Article Type
Thesis
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