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물체의 표면현상 측정에 있어 정밀도 향상을 위한 위상더하기 방법의 활용

Title
물체의 표면현상 측정에 있어 정밀도 향상을 위한 위상더하기 방법의 활용
Authors
이용구
Date Issued
2010
Publisher
포항공과대학교
Abstract
We use the technique based on shifting the illumination beam which is relatively achieved less costly than those based on variations of wavelength in surface shape measurement. We can control the sensitivity by controlling the illumination angle and tilt angle. Therefore we can apply this method for measurement the object with various sizes. But there have limitation of tilt angle due to decorrelation. So we suggest phase summation procedure for enhancement of the sensitivity. This method has more good sensitivity than the present method that only subtract procedure phase. We performed the experiment set-up and introduce some techniques that can reduce the speckle noise. And we prove that this procedure has the superiority. Also we explain limitation of this method.
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000000570777
http://oasis.postech.ac.kr/handle/2014.oak/759
Article Type
Thesis
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