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The effect of oxidation annealing on reduction of plasma-induced-damage in AlGaN/GaN heterostructure

Title
The effect of oxidation annealing on reduction of plasma-induced-damage in AlGaN/GaN heterostructure
Authors
이종람
POSTECH Authors
이종람
Date Issued
1-May-2003
URI
http://oasis.postech.ac.kr/handle/2014.oak/74006
Article Type
Conference
Citation
ICNS-5, 2003-05-01
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 LEE, JONG LAM
Dept of Materials Science & Enginrg
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