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VTMS(vinyltrimethylsilane)와 탄산가스를 이용한 저유전체 SiCOH 박막의 플라즈마 화학증착

Title
VTMS(vinyltrimethylsilane)와 탄산가스를 이용한 저유전체 SiCOH 박막의 플라즈마 화학증착
Authors
정기훈
Date Issued
2004
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906790
http://141.223.5.61//handle/2014.oak/7008
Article Type
Thesis
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