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DLI(Direct Liquid Injection) 공정을 이용한 HfO2와 Hf aluminate박막의 유기금속 화학증착

Title
DLI(Direct Liquid Injection) 공정을 이용한 HfO2와 Hf aluminate박막의 유기금속 화학증착
Authors
송문균
Date Issued
2004
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906731
http://141.223.5.61//handle/2014.oak/6949
Article Type
Thesis
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