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TPD (Temperature programmed desorption)를 이용한 Tetrakis(diethylamido)zirconium (TDEAZr)의 Si(100) 표면에서의 열 분해 반응 연구

Title
TPD (Temperature programmed desorption)를 이용한 Tetrakis(diethylamido)zirconium (TDEAZr)의 Si(100) 표면에서의 열 분해 반응 연구
Authors
정준희
Date Issued
2003
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906390
http://141.223.5.61//handle/2014.oak/6608
Article Type
Thesis
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