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Si(100) 표면에서 TBOS[tetrabutoxyorthosilane]의 분해반응 연구

Title
Si(100) 표면에서 TBOS[tetrabutoxyorthosilane]의 분해반응 연구
Authors
이나경
Date Issued
2003
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906362
http://141.223.5.61//handle/2014.oak/6581
Article Type
Thesis
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