Bulge 실험을 통한 티타늄 박막의 기계적 물성 측정
- Bulge 실험을 통한 티타늄 박막의 기계적 물성 측정
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- In this study, the mechanical properties of titanium thin film are investigated. Freestanding film of titanium is fabricated using the standard micro-machining techniques. Titanium thin film were deposited in a RF magnetron sputtering system on the Si(100) wafers containing a layer of silicon oxide. Specimens were prepared on 8 Ⅹ 2 ㎜ rectangular membrane window 21 Ⅹ 21 ㎜ frame. Titanium thin film were deposited by 1.0, 1.5 and 2.0 ㎛ thickness. And annealing was performed at 150, 300 and 600 s for 600 ℃. Mechanical properties of these membranes are measured by the plane-strain bulge test method. The plane-strain bulge test is a powerful new technique for measuring the mechanical properties of thin films. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus, residual stress and yield stress at a 0.2 % offset.
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