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PH₃Ion Shower Implantation을 이용한 Fully Depleted SOI MOSFET의 SD형성에 관한 연구= A Study on the S

Title
PH₃Ion Shower Implantation을 이용한 Fully Depleted SOI MOSFET의 SD형성에 관한 연구= A Study on the S
Authors
김기수
Date Issued
2003
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906341
http://141.223.5.61//handle/2014.oak/6560
Article Type
Thesis
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