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1차원 입자코드를 이용한 Capacitively Coupled Plasmas 소스의 해석

Title
1차원 입자코드를 이용한 Capacitively Coupled Plasmas 소스의 해석
Authors
정태린
Date Issued
2003
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906232
http://141.223.5.61//handle/2014.oak/6452
Article Type
Thesis
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