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Metrology Analysis of Sub-100 nm Grating Patterns using High Precision Transmission Small Angle X-ray Scattering Technique
- Title
- Metrology Analysis of Sub-100 nm Grating Patterns using High Precision Transmission Small Angle X-ray Scattering Technique
- Authors
- 김오현
- POSTECH Authors
- 김오현
- Date Issued
- 4-Nov-2012
- Publisher
- Japan Society of Applied Physics
- Article Type
- Conference
- Citation
- MNC 2012, 2012-11-04
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Related Researcher
- 김오현KIM, OHYUN
- Dept of Electrical Enginrg