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하이브리드형 상대압 용량성 압력센서의 개발 (The Development of Hybrid Type Relative Pressure Sensor)
- Title
- 하이브리드형 상대압 용량성 압력센서의 개발 (The Development of Hybrid Type Relative Pressure Sensor)
- POSTECH Authors
- 임근배
- Date Issued
- 15-Jan-1992
- Publisher
- 대한전자공학회
- Article Type
- Conference
- Citation
- 대한전자공학회 학술발표회 논문집 (반도체/재료부품/CAD/VLSI), 1992-01-15
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg