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하이브리드형 상대압 용량성 압력센서의 개발 (The Development of Hybrid Type Relative Pressure Sensor)

Title
하이브리드형 상대압 용량성 압력센서의 개발 (The Development of Hybrid Type Relative Pressure Sensor)
Authors
임근배배준형서희돈
POSTECH Authors
임근배
Date Issued
15-Jan-1992
Publisher
대한전자공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/63691
Article Type
Conference
Citation
대한전자공학회 학술발표회 논문집 (반도체/재료부품/CAD/VLSI), 1992-01-15
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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