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진동형 MEMS 자이로의 감도 향상을 위한 전극 후공정 고정기법

Title
진동형 MEMS 자이로의 감도 향상을 위한 전극 후공정 고정기법
Authors
임근배석세영성중우이상우
POSTECH Authors
임근배
Date Issued
12-Jul-2012
Publisher
국방과학연구소, 한국군사과학기술학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/63638
Article Type
Conference
Citation
제3회 감시정찰정보학술대회, 2012-07-12
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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