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Extension of the Transition Layer at the Vertical Interface of Si/SiO2 observed in Atom Probe Tomography

Title
Extension of the Transition Layer at the Vertical Interface of Si/SiO2 observed in Atom Probe Tomography
Authors
박찬경이지현구길호
POSTECH Authors
박찬경
Date Issued
21-May-2012
Publisher
IFES
URI
http://oasis.postech.ac.kr/handle/2014.oak/63486
Article Type
Conference
Citation
IFES 2012, 2012-05-21
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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