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Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography

Title
Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography
Authors
박찬경김보화구길호
POSTECH Authors
박찬경
Date Issued
5-Feb-2012
Publisher
APMC
URI
http://oasis.postech.ac.kr/handle/2014.oak/63445
Article Type
Conference
Citation
APMC 2012, 2012-02-05
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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