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Control of oxygen vacancies by plasma enhanced atomic layer deposition (PEALD) of TiO2 for memristors

Title
Control of oxygen vacancies by plasma enhanced atomic layer deposition (PEALD) of TiO2 for memristors
Authors
백성기박상준
Date Issued
8-Aug-2012
Publisher
울산대학교
URI
http://oasis.postech.ac.kr/handle/2014.oak/63377
Article Type
Conference
Citation
The 9th Korea-Jpan Conference on Ferroelectrics, 2012-08-08
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