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MD simulations on the momentum transfer to nano contaminant particle on wafer surface in collisions with cleaning bullets

Title
MD simulations on the momentum transfer to nano contaminant particle on wafer surface in collisions with cleaning bullets
Authors
이진원최민석
POSTECH Authors
이진원
Date Issued
20-Jun-2012
Publisher
NanoTech
URI
http://oasis.postech.ac.kr/handle/2014.oak/63068
Article Type
Conference
Citation
NanoTech 2012, 2012-06-20
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이진원LEE, JIN WON
Dept of Mechanical Enginrg
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