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Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope

Title
Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope
Authors
임근배석세영성중우권혁진김민서
POSTECH Authors
임근배
Date Issued
23-Sep-2012
Publisher
JCK MEMS
URI
http://oasis.postech.ac.kr/handle/2014.oak/63005
Article Type
Conference
Citation
JCK MEMS, 2012-09-23
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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