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Effect of deposition temperature on metal-insulator-metal capacitors fabricated using a mixed alkylamido-cyclopentadienyl zirconium precursor

Title
Effect of deposition temperature on metal-insulator-metal capacitors fabricated using a mixed alkylamido-cyclopentadienyl zirconium precursor
Authors
이시우원동찬
Date Issued
7-Nov-2012
Publisher
The Society of Chemical Engineers, Japan (SCEJ)
URI
http://oasis.postech.ac.kr/handle/2014.oak/62515
Article Type
Conference
Citation
10th Japan-Korea Symposium on Materials & Interface International Symposium on Frontiers in Chemical Engineering, 2012-11-07
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