Silicate Replica Molds from Sol-Gel Hybrid Resin and Polysilazane for Nanoimprint Lithography
- Silicate Replica Molds from Sol-Gel Hybrid Resin and Polysilazane for Nanoimprint Lithography
- POSTECH Authors
- Date Issued
- Osaka Prefecture University
- Article Type
- 2nd Japan-Korea Joint Forum on Sol-Gel Science and Technology, 2010-06-27
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