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Silicate Replica Molds from Sol-Gel Hybrid Resin and Polysilazane for Nanoimprint Lithography

Title
Silicate Replica Molds from Sol-Gel Hybrid Resin and Polysilazane for Nanoimprint Lithography
Authors
김동표
POSTECH Authors
김동표
Date Issued
27-Jun-2010
Publisher
Osaka Prefecture University
URI
http://oasis.postech.ac.kr/handle/2014.oak/62455
Article Type
Conference
Citation
2nd Japan-Korea Joint Forum on Sol-Gel Science and Technology, 2010-06-27
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김동표KIM, DONG PYO
Dept. of Chemical Enginrg
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