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Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Epitaxy

Title
Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Epitaxy
Authors
정윤하
POSTECH Authors
정윤하
Date Issued
5-Sep-2012
Publisher
IEEE
URI
http://oasis.postech.ac.kr/handle/2014.oak/62342
Article Type
Conference
Citation
The International Conference on Simulation of Semiconductor Processes and Devices, 2012-09-05
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정윤하JEONG, YOON HA
Dept of Electrical Enginrg
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