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A cost-effective laser interference lithography using 30mW AlInGaN semiconductor laser

Title
A cost-effective laser interference lithography using 30mW AlInGaN semiconductor laser
Authors
김준원변익주
POSTECH Authors
김준원
Date Issued
23-Nov-2009
Publisher
International Conference on Laser Ablation
URI
http://oasis.postech.ac.kr/handle/2014.oak/61468
Article Type
Conference
Citation
10th International Conference on Laser Ablation 2009, 2009-11-23
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김준원KIM, JOON WON
Dept of Mechanical Enginrg
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