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DLI (Direct Liquid Injection) 공정을 이용한 PZT 박막의 유기금속화학증착

Title
DLI (Direct Liquid Injection) 공정을 이용한 PZT 박막의 유기금속화학증착
Authors
김대환
Date Issued
2002
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905918
http://141.223.5.61//handle/2014.oak/6146
Article Type
Thesis
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