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Chloride 화합물과 Alkoxide 화합물을 이용한 Zirconium Silicate 박막의 원자층 화학증착

Title
Chloride 화합물과 Alkoxide 화합물을 이용한 Zirconium Silicate 박막의 원자층 화학증착
Authors
김원규
Date Issued
2002
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905910
http://141.223.5.61//handle/2014.oak/6138
Article Type
Thesis
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