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Effects of W Diffusion Barrier on Inhibition of AlN Formation in Ti/Al based Ohmic Contacts on N-polar N-GaN

Title
Effects of W Diffusion Barrier on Inhibition of AlN Formation in Ti/Al based Ohmic Contacts on N-polar N-GaN
Authors
이종람송양희손준호김범준
POSTECH Authors
이종람
Date Issued
16-Feb-2012
Publisher
제 19회 반도체 학술대회
URI
http://oasis.postech.ac.kr/handle/2014.oak/60677
Article Type
Conference
Citation
제 19회 반도체 학술대회, 2012-02-16
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 LEE, JONG LAM
Dept of Materials Science & Enginrg
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