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반응성 스퍼터링 증착에 의한 AlN박막의 전계 방출 특성

Title
반응성 스퍼터링 증착에 의한 AlN박막의 전계 방출 특성
Authors
정재웅
Date Issued
2001
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905677
http://141.223.5.61//handle/2014.oak/5905
Article Type
Thesis
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