Microlens Fabrication by the Modified LIGA Process and Its Modeling and Analysis
- Microlens Fabrication by the Modified LIGA Process and Its Modeling and Analysis
- 이성근; 김동성; 양상식; 권태헌; 이승섭
- POSTECH Authors
- 김동성; 권태헌; 이승섭
- Date Issued
- Institute of Electrical and Electronics Engineers
- Article Type
- 2002 IEEE/LEOS International Conference on Optical MEMS, 2002-08-22
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