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Microlens Fabrication by the Modified LIGA Process and Its Modeling and Analysis

Title
Microlens Fabrication by the Modified LIGA Process and Its Modeling and Analysis
Authors
이성근김동성양상식권태헌이승섭
POSTECH Authors
김동성권태헌이승섭
Date Issued
22-Aug-2002
Publisher
Institute of Electrical and Electronics Engineers
URI
http://oasis.postech.ac.kr/handle/2014.oak/58875
Article Type
Conference
Citation
2002 IEEE/LEOS International Conference on Optical MEMS, 2002-08-22
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