In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition
- In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition
- 백성기; 박용준; 이현희; 박계춘; 이시우
- Date Issued
- Gwangju-Jeonnam Nano Science and Technology Union
- Article Type
- GJ-NST 2009, 2009-11-05
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.