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In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition

Title
In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition
Authors
백성기박용준이현희박계춘이시우
Date Issued
5-Nov-2009
Publisher
Gwangju-Jeonnam Nano Science and Technology Union
URI
http://oasis.postech.ac.kr/handle/2014.oak/58540
Article Type
Conference
Citation
GJ-NST 2009, 2009-11-05
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