In-situ Synchrotron X-ray Measurement of thin Film Growth by Atomic Layer Deposition
- In-situ Synchrotron X-ray Measurement of thin Film Growth by Atomic Layer Deposition
- 백성기; 박용준
- Date Issued
- 한국 방사광이용자협회 (KOSUA)
- Article Type
- The 21th Synchrotron Radiation User's Workshop, 2009-11-20
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