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In-situ Synchrotron X-ray Measurement of thin Film Growth by Atomic Layer Deposition

Title
In-situ Synchrotron X-ray Measurement of thin Film Growth by Atomic Layer Deposition
Authors
백성기박용준
Date Issued
20-Nov-2009
Publisher
한국 방사광이용자협회 (KOSUA)
URI
http://oasis.postech.ac.kr/handle/2014.oak/58539
Article Type
Conference
Citation
The 21th Synchrotron Radiation User's Workshop, 2009-11-20
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