Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.

Title
In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.
Authors
백성기박용준김형준이시우
Date Issued
20-Jun-2010
Publisher
American Vacuum Society
URI
http://oasis.postech.ac.kr/handle/2014.oak/58529
Article Type
Conference
Citation
ALD2010, 2010-06-20
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Views & Downloads

Browse