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In-situ Synchrotron Radiation X-ray Scattering Study on the Initial Structure of Atomic Layer Deposition.

Title
In-situ Synchrotron Radiation X-ray Scattering Study on the Initial Structure of Atomic Layer Deposition.
Authors
백성기박용준이동열
Date Issued
25-Jul-2010
Publisher
Physics of Semiconductor Society
URI
http://oasis.postech.ac.kr/handle/2014.oak/58520
Article Type
Conference
Citation
ICPS2010, 2010-07-25
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