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Characterization of the initial ALD growth of TaN using Synchrotron X-ray Reflectivity.

Title
Characterization of the initial ALD growth of TaN using Synchrotron X-ray Reflectivity.
Authors
백성기박용준이동열
Date Issued
16-Feb-2011
Publisher
한국반도체학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/58491
Article Type
Conference
Citation
2011KCS (제18회 한국반도체학술대회), 2011-02-16
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