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Ti(dmae)4와 Zr(dmae)4 (dmae= dimethylaminoethoxide)를 이용한 TiO2와 ZrO2 gate dielectrics의 유기금속 화학증착

Title
Ti(dmae)4와 Zr(dmae)4 (dmae= dimethylaminoethoxide)를 이용한 TiO2와 ZrO2 gate dielectrics의 유기금속 화학증착
Authors
나정석
Date Issued
2001
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905569
http://141.223.5.61//handle/2014.oak/5797
Article Type
Thesis
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