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평판 전극 감지축을 이용하는 2축 MEMS 자이로스코프의 설계

Title
평판 전극 감지축을 이용하는 2축 MEMS 자이로스코프의 설계
Authors
임근배석세영성중우이상우
POSTECH Authors
임근배
Date Issued
7-Apr-2011
Publisher
제 13회 한국 MEMS 학술대회
URI
http://oasis.postech.ac.kr/handle/2014.oak/57696
Article Type
Conference
Citation
제 13회 한국 MEMS 학술대회, 2011-04-07
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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