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Microwave ellipsometry를 이용한 평판형 시료의 유전율과 두께 측정법

Title
Microwave ellipsometry를 이용한 평판형 시료의 유전율과 두께 측정법
Authors
박위상조규영
POSTECH Authors
박위상
Date Issued
26-Nov-2010
Publisher
한국전자파학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/57043
Article Type
Conference
Citation
2010년 종합학술발표회, 2010-11-26
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박위상PARK, WEE SANG
Dept of Electrical Enginrg
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