Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads
Full metadata record
Files in This Item:
There are no files associated with this item.
DC FieldValueLanguage
dc.contributor.author이시우ko
dc.contributor.author김석훈ko
dc.date.accessioned2018-06-17T09:46:59Z-
dc.date.available2018-06-17T09:46:59Z-
dc.date.created2009-11-09-
dc.date.issued2009-11-05-
dc.identifier.citation2009년도 한국재료학회 추계학술발표대회 및 제17회 신소재 심포지엄-
dc.identifier.urihttp://oasis.postech.ac.kr/handle/2014.oak/56765-
dc.publisher한국재료학회-
dc.titleChemical vapor deposition of TaCxNy films using tert-butylimido tris-diethylamido tantalum (TBTDET): reaction mechanism and film charateristics-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.title2009년도 한국재료학회 추계학술발표대회 및 제17회 신소재 심포지엄-
dc.description.journalClass2-
dc.identifier.conferencecountryKO-

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Views & Downloads

Browse