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질소 Helicon wave Plasma를 이용한 GaN 에피 박막성장에 관한 연구

Title
질소 Helicon wave Plasma를 이용한 GaN 에피 박막성장에 관한 연구
Authors
김기성
Date Issued
2000
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905387
http://141.223.5.61//handle/2014.oak/5615
Article Type
Thesis
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