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375nm 반도체 UV 레이저를 이용한 미세 입자분사가공 SU-8 마스크의 제작

Title
375nm 반도체 UV 레이저를 이용한 미세 입자분사가공 SU-8 마스크의 제작
Authors
조동우
POSTECH Authors
조동우
Date Issued
21-Jun-2007
Publisher
한국정밀공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/55884
Article Type
Conference
Citation
한국정밀공학회 2007년도 춘계학술대회, page. 663 - 664, 2007-06-21
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조동우CHO, DONG WOO
Dept of Mechanical Enginrg
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